Capacity planning for cluster tools in the semiconductor industry
نویسندگان
چکیده
منابع مشابه
Capacity Planning for Cluster Tools in the Semiconductor Industry
This paper proposes a new model for Cluster-tools with two load locks. Clustertools are widely used to automate single wafer processing in semiconductor industry. The load locks are the entry points into the vacuum of the Clustertool’s mainframe. Usually there are two of them available. Each lot being processed, is dedicated to a single load-lock. Therefore at most two different lots (with poss...
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ژورنال
عنوان ژورنال: International Journal of Production Economics
سال: 2017
ISSN: 0925-5273
DOI: 10.1016/j.ijpe.2017.01.005